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Integrated High Aspect Ratio 3D High Density Capacitor in S..:

, In: 2023 International VLSI Symposium on Technology, Systems and Applications (VLSI-TSA/VLSI-DAT),
Lu, Chun-Lin ; Ho, Cheng-Shu ; Liu, Kuo-Wei... - p. 1-2 , 2023
Link: https://doi.org/10.1109/VLSI-TSA/VLSI-DAT57221.2023.10..