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Low Dit of $(2-4)\times 10^{10}$ using Y2O3/epi-Si/Ge Gate ..:

, In: 2023 International VLSI Symposium on Technology, Systems and Applications (VLSI-TSA/VLSI-DAT),
Wan, Hsien-Wen ; Cheng, Yi-Ting ; Cheng, Chao-Kai... - p. 1-2 , 2023
Link: https://doi.org/10.1109/VLSI-TSA/VLSI-DAT57221.2023.10..