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1 Ergebnisse
1
Low-Cost Navigation-grade MEMS Fabrication Platform to Enab..:
, In:
2023 IEEE/ION Position, Location and Navigation Symposium (PLANS)
,
Lin, David
;
Macdonald, Robert
;
Popp, Jeremy
... - p. 1-5 , 2023
Link:
https://doi.org/10.1109/PLANS53410.2023.10140000
RT T1 <cTitle>2023 IEEE/ION Position, Location and Navigation Symposium (PLANS)</cTitle>: T1 <Title>Low-Cost Navigation-grade MEMS Fabrication Platform to Enable PNT Innovations</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10140000&Exemplar=1&LAN=DE A1 Lin, David A1 Macdonald, Robert A1 Popp, Jeremy A1 Alberda, Matthew A1 Andarawis, Emad A1 Aimi, Marco YR 2023 SN 2153-3598 K1 Micromechanical devices K1 Fabrication K1 Technological innovation K1 Navigation K1 Semiconductor device reliability K1 Silicon-on-insulator K1 Prototypes K1 MEMS Fabrication K1 Inertial Sensor K1 Navigation-grade SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/PLANS53410.2023.10140000 DO https://doi.org/10.1109/PLANS53410.2023.10140000 SF ELIB - SuUB Bremen
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