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Atomic Layer Deposition and Sputtering of Piezoelectric Thi..:

, In: 2023 IEEE/ION Position, Location and Navigation Symposium (PLANS),
Strnad, Nicholas A. ; Knight, Ryan R. ; Rudy, Ryan Q.... - p. 10-17 , 2023
Link: https://doi.org/10.1109/PLANS53410.2023.10140027