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1 Ergebnisse
1
Analysis of Resonant Characteristics of Microelectronic Pie..:
, In:
2023 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF)
,
Kozlov, A. G.
;
Torgash, T. N.
- p. 1-5 , 2023
Link:
https://doi.org/10.1109/WECONF57201.2023.10147936
RT T1
2023 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF)
: T1
Analysis of Resonant Characteristics of Microelectronic Piezoelectric Resonators with a Top Molybdenum-Aluminum Electrode
UL https://suche.suub.uni-bremen.de/peid=ieee-10147936&Exemplar=1&LAN=DE A1 Kozlov, A. G. A1 Torgash, T. N. YR 2023 SN 2769-3538 K1 Electrodes K1 Aluminum K1 Air gaps K1 Resonant frequency K1 Microelectronics K1 Telecommunications K1 Resonators K1 piezoelectric resonator K1 resonant frequency K1 bulk acoustic waves K1 Bragg acoustic reflector K1 top two-layer electrode K1 molybdenum layer K1 aluminum layer SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/WECONF57201.2023.10147936 DO https://doi.org/10.1109/WECONF57201.2023.10147936 SF ELIB - SuUB Bremen
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