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A robust embedded ladder-oxide/Cu multilevel interconnect t..:

, In: 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303),
Oda, N. ; Usami, T. ; Ohto, K.... - p. 34,35 , 2002
Link: https://doi.org/10.1109/VLSIT.2002.1015377