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A simple analytical model to describe time-resolved concent..:
, In:
2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM)
,
Haase, Micha
;
Dittmar, Nils
;
Kuchler, Matthias
. - p. 1-3 , 2023
Link:
https://doi.org/10.1109/IITC/MAM57687.2023.10154646
RT T1 <cTitle>2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM)</cTitle>: T1 <Title>A simple analytical model to describe time-resolved concentrations of plasma species</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10154646&Exemplar=1&LAN=DE A1 Haase, Micha A1 Dittmar, Nils A1 Kuchler, Matthias A1 Reuter, Danny YR 2023 SN 2380-6338 K1 Analytical models K1 Spectroscopy K1 Plasma diagnostics K1 Metallization K1 Absorption K1 Production K1 Mathematical models K1 process plasma K1 plasma diagnostics K1 absorption spectroscopy K1 molecular plasma species SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/IITC/MAM57687.2023.10154646 DO https://doi.org/10.1109/IITC/MAM57687.2023.10154646 SF ELIB - SuUB Bremen
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