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Multi-scale simulation of epitaxial processes:

, In: 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM),
Jackel, Linda ; Zienert, Andreas ; Lorenz, Erik E... - p. 1-3 , 2023
Link: https://doi.org/10.1109/IITC/MAM57687.2023.10154676