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1 Ergebnisse
1
Measuring Ion Energy Distributions by Retarding Field Energ..:
, In:
2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM)
,
Dittmar, Nils
;
Berger, Birk
;
Melzer, Marcel
... - p. 1-3 , 2023
Link:
https://doi.org/10.1109/IITC/MAM57687.2023.10154736
RT T1 <cTitle>2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM)</cTitle>: T1 <Title>Measuring Ion Energy Distributions by Retarding Field Energy Analyzer and Using Low-Energy Ions for Si-ALE by Cl2</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10154736&Exemplar=1&LAN=DE A1 Dittmar, Nils A1 Berger, Birk A1 Melzer, Marcel A1 Kuchler, Matthias A1 Meinecke, Christoph A1 Haase, Micha A1 Reuter, Danny YR 2023 SN 2380-6338 K1 Atomic measurements K1 Atomic force microscopy K1 Force measurement K1 Metallization K1 Atomic layer deposition K1 Force K1 Energy measurement K1 atomic layer etching K1 ion energy distribution K1 damage-free etch K1 retarding field energy analyzer SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/IITC/MAM57687.2023.10154736 DO https://doi.org/10.1109/IITC/MAM57687.2023.10154736 SF ELIB - SuUB Bremen
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