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Pre-treatment study for barrier-less Ruthenium filling into..:

, In: 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM),
Yonezawa, R. ; Yu, K. ; Aizawa, H.... - p. 1-3 , 2023
Link: https://doi.org/10.1109/IITC/MAM57687.2023.10154739