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TaN thin film study for Superconducting BEOL integration:

, In: 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM),
Segaud, R. ; Chene, T. ; Gergaud, P.... - p. 1-3 , 2023
Link: https://doi.org/10.1109/IITC/MAM57687.2023.10154766