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1 Ergebnisse
1
Ruthenium and Rhodium Vertical Interconnect Formation Using..:
, In:
2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM)
,
Hossain, Mohammad Mobassar
;
Schlag, Leslie
;
Wolz, Benedikt
... - p. 1-3 , 2023
Link:
https://doi.org/10.1109/IITC/MAM57687.2023.10154806
RT T1 <cTitle>2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM)</cTitle>: T1 <Title>Ruthenium and Rhodium Vertical Interconnect Formation Using Gas Phase Electrodeposition</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10154806&Exemplar=1&LAN=DE A1 Hossain, Mohammad Mobassar A1 Schlag, Leslie A1 Wolz, Benedikt A1 Ziegler, Mario A1 Nahrstedt, Helene A1 Reichel, Helene A1 Pezoldt, Jorg A1 Jacobs, Heiko Otto YR 2023 SN 2380-6338 K1 Plasma jets K1 Additives K1 Ruthenium K1 Metallization K1 Rhodium K1 Fluid flow K1 Ions K1 gas phase electrodeposition K1 plasma jet K1 medium-ofline K1 vertical interconnects K1 ruthenium K1 rhodium SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/IITC/MAM57687.2023.10154806 DO https://doi.org/10.1109/IITC/MAM57687.2023.10154806 SF ELIB - SuUB Bremen
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