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1 Ergebnisse
1
Atomic-scale Crystal Phase Transformation of Atomic Layer D..:
, In:
2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM)
,
Lee, Sangyoon
;
Seo, Jeongwoo
;
Sohn, Inkyu
... - p. 1-3 , 2023
Link:
https://doi.org/10.1109/IITC/MAM57687.2023.10154820
RT T1 <cTitle>2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM)</cTitle>: T1 <Title>Atomic-scale Crystal Phase Transformation of Atomic Layer Deposited Antimony Telluride Thin Films with Substrate-dependent Orientations</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10154820&Exemplar=1&LAN=DE A1 Lee, Sangyoon A1 Seo, Jeongwoo A1 Sohn, Inkyu A1 Kang, Youngjae A1 Lee, Changseung A1 Yang, Wooyoung A1 Chung, Seung-Min A1 Kim, Hyungjun YR 2023 SN 2380-6338 K1 Resistance K1 Chalcogenides K1 Metallization K1 Atomic layer deposition K1 Crystals K1 Market research K1 Antimony K1 antimony telluride K1 atomic layer deposition K1 crystal phase transformation K1 atomic-scale K1 substrate dependency SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/IITC/MAM57687.2023.10154820 DO https://doi.org/10.1109/IITC/MAM57687.2023.10154820 SF ELIB - SuUB Bremen
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