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1 Ergebnisse
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Semimetallic Atomic Layer Deposited TiS2 Thin Films for Con..:
, In:
2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM)
,
Yoon, Hwi
;
Seo, Jeongwoo
;
Lee, Sangyoon
... - p. 1-3 , 2023
Link:
https://doi.org/10.1109/IITC/MAM57687.2023.10154841
RT T1
2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM)
: T1
Semimetallic Atomic Layer Deposited TiS2 Thin Films for Contact Resistance Improvement of MoS2-based Thin Film Transistor
UL https://suche.suub.uni-bremen.de/peid=ieee-10154841&Exemplar=1&LAN=DE A1 Yoon, Hwi A1 Seo, Jeongwoo A1 Lee, Sangyoon A1 Yoo, Jisang A1 Nam, Yunyong A1 Lim, Jun Hyung A1 Chung, Seung-Min A1 Kim, Hyungjun YR 2023 SN 2380-6338 K1 Temperature K1 Metallization K1 Atomic layer deposition K1 Titanium K1 Conductivity K1 Contact resistance K1 Thin film transistors K1 Titanium disulfide K1 atomic layer deposition K1 semimetal K1 contact resistance K1 2D material K1 thin film transistor SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/IITC/MAM57687.2023.10154841 DO https://doi.org/10.1109/IITC/MAM57687.2023.10154841 SF ELIB - SuUB Bremen
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