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Towards knowledge-enhanced process models for semiconductor..:
, In:
2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM)
,
Rothe, Tom
;
Sayyed, Mudassir Ali
;
Langer, Jan
... - p. 1-3 , 2023
Link:
https://doi.org/10.1109/IITC/MAM57687.2023.10154872
RT T1 <cTitle>2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM)</cTitle>: T1 <Title>Towards knowledge-enhanced process models for semiconductor fabrication</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10154872&Exemplar=1&LAN=DE A1 Rothe, Tom A1 Sayyed, Mudassir Ali A1 Langer, Jan A1 Gottfried, Knut A1 Schuster, Jorg A1 Stoll, Martin A1 Kuhn, Harald YR 2023 SN 2380-6338 K1 Semiconductor device modeling K1 Fabrication K1 Planarization K1 Metallization K1 Machine learning K1 Data models K1 Real-time systems K1 semiconductor process modeling K1 physics-informed machine learning K1 chemical-mechanical planarization SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/IITC/MAM57687.2023.10154872 DO https://doi.org/10.1109/IITC/MAM57687.2023.10154872 SF ELIB - SuUB Bremen
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