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Fabrication of sub-10 nm Gap by using Electron Beam Lithogr..:

, In: 2023 24th International Vacuum Electronics Conference (IVEC),
Yan, Bingnan ; Tu, Xuecou ; Zhang, Chen... - p. 1-2 , 2023
Link: https://doi.org/10.1109/IVEC56627.2023.10156935