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1 Ergebnisse
1
Deposition and Characterization of Ammonia-free PECVD Silic..:
, In:
2023 24th International Vacuum Electronics Conference (IVEC)
,
Li, Yue
;
Luo, Yi
;
Fang, Zhizeng
... - p. 1-3 , 2023
Link:
https://doi.org/10.1109/IVEC56627.2023.10157925
RT T1 <cTitle>2023 24th International Vacuum Electronics Conference (IVEC)</cTitle>: T1 <Title>Deposition and Characterization of Ammonia-free PECVD Silicon Nitride</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10157925&Exemplar=1&LAN=DE A1 Li, Yue A1 Luo, Yi A1 Fang, Zhizeng A1 Xu, Dengqin A1 Li, Qi A1 Zhang, Xing A1 Wang, Yi A1 Han, Dedong YR 2023 K1 Radio frequency K1 Temperature K1 Atomic layer deposition K1 Silicon nitride K1 Silicon K1 Plasmas K1 Microelectronics K1 silicon nitride K1 ammonia-free K1 PECVD K1 low deposition K1 XPS SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/IVEC56627.2023.10157925 DO https://doi.org/10.1109/IVEC56627.2023.10157925 SF ELIB - SuUB Bremen
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