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1 Ergebnisse
1
High-Performance ISFET pH Sensor with HfO2 Sensing Film Usi..:
, In:
2023 IEEE Ural-Siberian Conference on Biomedical Engineering, Radioelectronics and Information Technology (USBEREIT)
,
Grudtsov, Vitaliy
;
Ryazantsev, Dmitriy
;
Gubanova, Oksana
.. - p. 117-119 , 2023
Link:
https://doi.org/10.1109/USBEREIT58508.2023.10158889
RT T1 <cTitle>2023 IEEE Ural-Siberian Conference on Biomedical Engineering, Radioelectronics and Information Technology (USBEREIT)</cTitle>: T1 <Title>High-Performance ISFET pH Sensor with HfO2 Sensing Film Using Post-CMOS Processing</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10158889&Exemplar=1&LAN=DE A1 Grudtsov, Vitaliy A1 Ryazantsev, Dmitriy A1 Gubanova, Oksana A1 Eganova, Elena A1 Kuznetsov, Alexander YR 2023 SN 2769-3635 K1 Surface cleaning K1 Sensitivity K1 Linearity K1 Voltage K1 CMOS process K1 Hafnium oxide K1 Sensors K1 Ion-sensitive floating gate FET K1 pH-sensor K1 HfO2 K1 modified CMOS SP 117 OP 119 LK http://dx.doi.org/https://doi.org/10.1109/USBEREIT58508.2023.10158889 DO https://doi.org/10.1109/USBEREIT58508.2023.10158889 SF ELIB - SuUB Bremen
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