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Ion implantation-induced damage in 4H-SiC detected by photo..:

, In: 2023 21st International Workshop on Junction Technology (IWJT),
Zolnai, Z. ; Szivos, J. ; Sepsi, O.... - p. 1-3 , 2023
Link: https://doi.org/10.23919/IWJT59028.2023.10175169