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EZ-FET junctions activation by nanosecond laser annealing:

, In: 2023 21st International Workshop on Junction Technology (IWJT),
Abdou, N. Zerhouni ; Acosta-Alba, P. ; Brunet, L.... - p. 1-4 , 2023
Link: https://doi.org/10.23919/IWJT59028.2023.10175175