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1 Ergebnisse
1
Molecular Dynamics Simulation on Deformation Mechanism of C..:
, In:
2023 9th International Conference on Applied System Innovation (ICASI)
,
Do, Tan-Tai
;
Fang, Te-Hua
;
Cheng, Tsung-Chieh
- p. 118-120 , 2023
Link:
https://doi.org/10.1109/ICASI57738.2023.10179507
RT T1
2023 9th International Conference on Applied System Innovation (ICASI)
: T1
Molecular Dynamics Simulation on Deformation Mechanism of Chemical Mechanical Polishing
UL https://suche.suub.uni-bremen.de/peid=ieee-10179507&Exemplar=1&LAN=DE A1 Do, Tan-Tai A1 Fang, Te-Hua A1 Cheng, Tsung-Chieh YR 2023 SN 2768-4156 K1 Deformable models K1 Technological innovation K1 Boron K1 Deformation K1 Friction K1 Force K1 Surfaces K1 C-doped BN K1 sliding K1 Polishing K1 CMP SP 118 OP 120 LK http://dx.doi.org/https://doi.org/10.1109/ICASI57738.2023.10179507 DO https://doi.org/10.1109/ICASI57738.2023.10179507 SF ELIB - SuUB Bremen
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