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Integration of epitaxial monolayer MX₂ channels on 300mm wa..:

, In: 2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits),

Ghosh, S. ; Smets, Q. ; Banerjee, S.... - p. 1-2 , 2023

Link: https://doi.org/10.23919/VLSITechnologyandCir57934.202..

RT 
T1 <cTitle>2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)</cTitle>: T1 <Title>Integration of epitaxial monolayer MX₂ channels on 300mm wafers via Collective-Die-To-Wafer (CoD2W) transfer</Title>

UL https://suche.suub.uni-bremen.de/peid=ieee-10185215&Exemplar=1&LAN=DE
				
A1 Ghosh, S.
A1 Smets, Q.
A1 Banerjee, S.
A1 Schram, T.
A1 Kennes, K.
A1 Verheyen, R.
A1 Kumar, P.
A1 Boulon, M.-E.
A1 Groven, B.
A1 Silva, H. M.
A1 Kundu, S.
A1 Cott, D.
A1 Lin, D.
A1 Favia, P.
A1 Nuytten, T.
A1 Phommahaxay, A.
A1 Asselberghs, I.
A1 De La Rosa, C.
A1 Kar, G. S.
A1 Brems, S.
YR 2023
SN 2158-9682
K1 Silicon compounds
K1 Annealing
K1 Image color analysis
K1 Field effect transistors
K1 Optical device fabrication
K1 Very large scale integration
K1 Optical imaging
K1 Metal chalcogenide
K1 CoD2W
K1 TMDC
K1 transfer
SP 1
OP 2
LK http://dx.doi.org/https://doi.org/10.23919/VLSITechnologyandCir57934.2023.10185215
DO https://doi.org/10.23919/VLSITechnologyandCir57934.2023.10185215
SF ELIB - SuUB Bremen

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