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1 Ergebnisse
1
A Manufacturable AlScN Periodically Polarized Piezoelectric..:
, In:
2023 IEEE/MTT-S International Microwave Symposium - IMS 2023
,
Vetury, Ramakrishna
;
Kochhar, Abhay
;
Leathersich, Jeff
... - p. 891-894 , 2023
Link:
https://doi.org/10.1109/IMS37964.2023.10188141
RT T1 <cTitle>2023 IEEE/MTT-S International Microwave Symposium - IMS 2023</cTitle>: T1 <Title>A Manufacturable AlScN Periodically Polarized Piezoelectric Film Bulk Acoustic Wave Resonator (AlScN P3F BAW) Operating in Overtone Mode at X and Ku Band</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10188141&Exemplar=1&LAN=DE A1 Vetury, Ramakrishna A1 Kochhar, Abhay A1 Leathersich, Jeff A1 Moe, Craig A1 Winters, Mary A1 Shealy, Jeffrey A1 Olsson, Roy H. YR 2023 SN 2576-7216 K1 Piezoelectric films K1 Resonator filters K1 Resonant frequency K1 Scandium K1 Manufacturing K1 High frequency K1 Microwave filters K1 P3F K1 AlScN K1 BAW K1 XBAW K1 Resonators K1 RF Filters K1 MEMS K1 X-band K1 mm-wave K1 acoustic filters SP 891 OP 894 LK http://dx.doi.org/https://doi.org/10.1109/IMS37964.2023.10188141 DO https://doi.org/10.1109/IMS37964.2023.10188141 SF ELIB - SuUB Bremen
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