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A micro and low-cost packaging technology of high accuracy ..:

, In: 2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS),
Nie, Shaoxiao ; Hao, Yilong ; Meng, Fanrui.. - p. 128-131 , 2023
Link: https://doi.org/10.1109/NEMS57332.2023.10190892