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An Improved SOI-on-Glass Fabrication Method of Large-Area S..:

, In: 2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS),
Ran, Longqi ; Wu, Yichuan ; He, Jiangbo... - p. 62-65 , 2023
Link: https://doi.org/10.1109/NEMS57332.2023.10190975