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1 Ergebnisse
1
Deep Learning-Based Virtual Metrology in Multivariate Time ..:
, In:
2023 IEEE International Conference on Prognostics and Health Management (ICPHM)
,
Han, Siho
;
Min, Jihwan
;
Ma, Jui
... - p. 30-37 , 2023
Link:
https://doi.org/10.1109/ICPHM57936.2023.10194015
RT T1
2023 IEEE International Conference on Prognostics and Health Management (ICPHM)
: T1
Deep Learning-Based Virtual Metrology in Multivariate Time Series
UL https://suche.suub.uni-bremen.de/peid=ieee-10194015&Exemplar=1&LAN=DE A1 Han, Siho A1 Min, Jihwan A1 Ma, Jui A1 Hwang, Gyuil A1 Heo, Taeyeong A1 Kim, Young Eun A1 Kang, Sungjin A1 Kim, Hyojun A1 Park, Sangjong A1 Sung, Kisuk YR 2023 SN 2166-5656 K1 Semiconductor device modeling K1 Phase shift keying K1 Time series analysis K1 Neural networks K1 Process control K1 Metrology K1 Semiconductor device manufacture SP 30 OP 37 LK http://dx.doi.org/https://doi.org/10.1109/ICPHM57936.2023.10194015 DO https://doi.org/10.1109/ICPHM57936.2023.10194015 SF ELIB - SuUB Bremen
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