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Ultra-Fine Pitch RDL (UFPRDL) using Polymer Dual Damascene ..:

, In: 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC),
Pinho, Nelson ; Chery, Emmanuel ; Pantano, Nicolas... - p. 1364-1368 , 2023
Link: https://doi.org/10.1109/ECTC51909.2023.00233