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A high-bandwidth closed-loop MEMS force sensor with system ..:
, In:
2023 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)
,
Dadkhah, Diyako
;
Reza Moheimani, S. O.
- p. 79-84 , 2023
Link:
https://doi.org/10.1109/AIM46323.2023.10196208
RT T1 <cTitle>2023 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)</cTitle>: T1 <Title>A high-bandwidth closed-loop MEMS force sensor with system dynamics adjustment</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10196208&Exemplar=1&LAN=DE A1 Dadkhah, Diyako A1 Reza Moheimani, S. O. YR 2023 SN 2159-6255 K1 Performance evaluation K1 Micromechanical devices K1 Tracking loops K1 Force measurement K1 System dynamics K1 Force K1 Resonant frequency K1 Microelectromechanical systems K1 MEMS force sensor K1 control of MEMS K1 vibration control SP 79 OP 84 LK http://dx.doi.org/https://doi.org/10.1109/AIM46323.2023.10196208 DO https://doi.org/10.1109/AIM46323.2023.10196208 SF ELIB - SuUB Bremen
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