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1 Ergebnisse
1
Multi-axis Active Vibration Suppression for Wafer Transfer ..:
, In:
2023 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)
,
Qiu, Jiajie
;
Kim, Hongjin
;
Xia, Fangzhou
. - p. 1108-1114 , 2023
Link:
https://doi.org/10.1109/AIM46323.2023.10196218
RT T1 <cTitle>2023 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)</cTitle>: T1 <Title>Multi-axis Active Vibration Suppression for Wafer Transfer Systems</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10196218&Exemplar=1&LAN=DE A1 Qiu, Jiajie A1 Kim, Hongjin A1 Xia, Fangzhou A1 Youcef-Toumi, Kamal YR 2023 SN 2159-6255 K1 Vibrations K1 Semiconductor device measurement K1 Mechatronics K1 Nanofabrication K1 Estimation K1 Production K1 Hardware K1 Motion Vibration Control K1 Identification and Estimation in Mechatronics K1 Control Application in Mechatronics K1 Disturbance Observer K1 Overhead Hoist Transport Vehicle SP 1108 OP 1114 LK http://dx.doi.org/https://doi.org/10.1109/AIM46323.2023.10196218 DO https://doi.org/10.1109/AIM46323.2023.10196218 SF ELIB - SuUB Bremen
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