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1 Ergebnisse
1
Nonvolatile Silicon MEMS Optical Switch Based on Bistable M..:
, In:
2023 Opto-Electronics and Communications Conference (OECC)
,
Ma, Qian
;
Hu, Yinpeng
;
Lu, Ye
... - p. 1-3 , 2023
Link:
https://doi.org/10.1109/OECC56963.2023.10209727
RT T1 <cTitle>2023 Opto-Electronics and Communications Conference (OECC)</cTitle>: T1 <Title>Nonvolatile Silicon MEMS Optical Switch Based on Bistable Mechanical Beams</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10209727&Exemplar=1&LAN=DE A1 Ma, Qian A1 Hu, Yinpeng A1 Lu, Ye A1 Liu, Yunzhi A1 Li, Huan A1 Dai, Daoxin YR 2023 SN 2166-8892 K1 Micromechanical devices K1 Actuators K1 Optical switches K1 Silicon photonics K1 Foundries K1 Electrostatics K1 Standards K1 silicon photonics K1 MEMS K1 optical switch K1 nonvolatile K1 bistable mechanical beam SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/OECC56963.2023.10209727 DO https://doi.org/10.1109/OECC56963.2023.10209727 SF ELIB - SuUB Bremen
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