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1 Ergebnisse
1
A Resonant Accelerometer Based on Piezoelectric TBTF MEMS R..:
, In:
2023 6th International Conference on Electronics Technology (ICET)
,
Li, Lei
;
Tu, Cheng
;
Zhang, Xiao-Sheng
- p. 329-332 , 2023
Link:
https://doi.org/10.1109/ICET58434.2023.10211428
RT T1
2023 6th International Conference on Electronics Technology (ICET)
: T1
A Resonant Accelerometer Based on Piezoelectric TBTF MEMS Resonator and Two-stage Microleverage
UL https://suche.suub.uni-bremen.de/peid=ieee-10211428&Exemplar=1&LAN=DE A1 Li, Lei A1 Tu, Cheng A1 Zhang, Xiao-Sheng YR 2023 SN 2768-6515 K1 Accelerometers K1 Vibrations K1 Micromechanical devices K1 Sensitivity K1 Atmospheric measurements K1 Force K1 Frequency response K1 MEMS K1 resonant accelerometer K1 piezoelectric K1 TBTF K1 micro-leverage K1 oscillator SP 329 OP 332 LK http://dx.doi.org/https://doi.org/10.1109/ICET58434.2023.10211428 DO https://doi.org/10.1109/ICET58434.2023.10211428 SF ELIB - SuUB Bremen
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