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1
Identifying the Performance of Porous Silicon Based Humidit..:
, In:
2023 IEEE 14th Control and System Graduate Research Colloquium (ICSGRC)
,
Aziz, Wan Nur Sabrina Wan Ahmad
;
Rani, Rozina Abdul
;
Ngadiman, Nur Lili Suraya
... - p. 1-5 , 2023
Link:
https://doi.org/10.1109/ICSGRC57744.2023.10215396
RT T1
2023 IEEE 14th Control and System Graduate Research Colloquium (ICSGRC)
: T1
Identifying the Performance of Porous Silicon Based Humidity Sensors at Different Gold Contact Pad Spacings
UL https://suche.suub.uni-bremen.de/peid=ieee-10215396&Exemplar=1&LAN=DE A1 Aziz, Wan Nur Sabrina Wan Ahmad A1 Rani, Rozina Abdul A1 Ngadiman, Nur Lili Suraya A1 Ismail, Mohd Fauzi A1 Zolkapli, Maizatul A1 Zoolfakar, Ahmad Sabirin YR 2023 SN 2833-1028 K1 Performance evaluation K1 Gold K1 Sensitivity K1 Annealing K1 Humidity K1 X-ray diffraction K1 Stability analysis K1 porous silicon K1 anodization K1 annealing K1 contact gaps K1 humidity sensor SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/ICSGRC57744.2023.10215396 DO https://doi.org/10.1109/ICSGRC57744.2023.10215396 SF ELIB - SuUB Bremen
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