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1
Simulation of Projection Lithography Based on FDTD Method:
, In:
2023 International Symposium of Electronics Design Automation (ISEDA)
,
Chen, Lu
;
Zhou, Zai-Fa
;
Guo, Kai-Qi
.. - p. 486-490 , 2023
Link:
https://doi.org/10.1109/ISEDA59274.2023.10218440
RT T1 <cTitle>2023 International Symposium of Electronics Design Automation (ISEDA)</cTitle>: T1 <Title>Simulation of Projection Lithography Based on FDTD Method</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10218440&Exemplar=1&LAN=DE A1 Chen, Lu A1 Zhou, Zai-Fa A1 Guo, Kai-Qi A1 Tian, Shi-Yao A1 Huang, Qing-An YR 2023 K1 Diffraction K1 Lithography K1 Imaging K1 Resists K1 Reliability theory K1 Predictive models K1 Reliability engineering K1 Projection lithography K1 Lithography simulation K1 Vector diffraction theory K1 FDTD SP 486 OP 490 LK http://dx.doi.org/https://doi.org/10.1109/ISEDA59274.2023.10218440 DO https://doi.org/10.1109/ISEDA59274.2023.10218440 SF ELIB - SuUB Bremen
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