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1 Ergebnisse
1
Stochastic EUV Resist Model:
, In:
2023 International Symposium of Electronics Design Automation (ISEDA)
,
He, Guangjian
;
Xue, Jing
;
Fan, Taian
. - p. 477-482 , 2023
Link:
https://doi.org/10.1109/ISEDA59274.2023.10218517
RT T1
2023 International Symposium of Electronics Design Automation (ISEDA)
: T1
Stochastic EUV Resist Model
UL https://suche.suub.uni-bremen.de/peid=ieee-10218517&Exemplar=1&LAN=DE A1 He, Guangjian A1 Xue, Jing A1 Fan, Taian A1 Wei, Yayi YR 2023 K1 Solid modeling K1 Extreme ultraviolet lithography K1 Three-dimensional displays K1 Inhibitors K1 Computational modeling K1 Stochastic processes K1 Resists K1 EUV K1 photoresist K1 stochastic K1 Gillespie SP 477 OP 482 LK http://dx.doi.org/https://doi.org/10.1109/ISEDA59274.2023.10218517 DO https://doi.org/10.1109/ISEDA59274.2023.10218517 SF ELIB - SuUB Bremen
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