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1 Ergebnisse
1
Trimming of Silicon Nitride Hard Mask Using Cyclic Depositi..:
, In:
2023 China Semiconductor Technology International Conference (CSTIC)
,
Xu, Li-Tian
;
Mei, Pei
;
Yao, Xing-Jun
... - p. 1-2 , 2023
Link:
https://doi.org/10.1109/CSTIC58779.2023.10219160
RT T1
2023 China Semiconductor Technology International Conference (CSTIC)
: T1
Trimming of Silicon Nitride Hard Mask Using Cyclic Deposition and Etch Process
UL https://suche.suub.uni-bremen.de/peid=ieee-10219160&Exemplar=1&LAN=DE A1 Xu, Li-Tian A1 Mei, Pei A1 Yao, Xing-Jun A1 Chen, Chen A1 Zhang, Jia-Yun A1 Zhang, Alan A1 Wu, Xiao-Peng A1 Han, Wu-Hao A1 Lin, Hong-Bo A1 Zhang, Nichole YR 2023 K1 Memory management K1 Random access memory K1 Silicon nitride K1 Ions K1 Etching K1 Manufacturing SP 1 OP 2 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC58779.2023.10219160 DO https://doi.org/10.1109/CSTIC58779.2023.10219160 SF ELIB - SuUB Bremen
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