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1 Ergebnisse
1
Analysis of the Adsorption and Passivation Mechanism of JFC..:
, In:
2023 China Semiconductor Technology International Conference (CSTIC)
,
Zhan, Ni
;
Niu, Xinhuan
;
Zhang, Yinchan
.. - p. 1-3 , 2023
Link:
https://doi.org/10.1109/CSTIC58779.2023.10219207
RT T1 <cTitle>2023 China Semiconductor Technology International Conference (CSTIC)</cTitle>: T1 <Title>Analysis of the Adsorption and Passivation Mechanism of JFCE on Copper Surface in Alkaline CMP Slurry</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10219207&Exemplar=1&LAN=DE A1 Zhan, Ni A1 Niu, Xinhuan A1 Zhang, Yinchan A1 Luo, Fu A1 Yan, Han YR 2023 K1 Scanning electron microscopy K1 Spectroscopy K1 Semiconductor device measurement K1 Electric potential K1 Planarization K1 Adsorption K1 Surfactants K1 Chemical Mechanical Planarization (CMP) K1 JFCE surfactant K1 adsorption mechanism K1 copper SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC58779.2023.10219207 DO https://doi.org/10.1109/CSTIC58779.2023.10219207 SF ELIB - SuUB Bremen
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