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1 Ergebnisse
1
Investigation of Vertical Channel IGZO-TFT Based on PVD-IGZ:
, In:
2023 China Semiconductor Technology International Conference (CSTIC)
,
Song, Zhiyu
;
Xu, Gaobo
;
Yan, Gangping
... - p. 1-3 , 2023
Link:
https://doi.org/10.1109/CSTIC58779.2023.10219251
RT T1 <cTitle>2023 China Semiconductor Technology International Conference (CSTIC)</cTitle>: T1 <Title>Investigation of Vertical Channel IGZO-TFT Based on PVD-IGZO</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10219251&Exemplar=1&LAN=DE A1 Song, Zhiyu A1 Xu, Gaobo A1 Yan, Gangping A1 Yang, Shangbo A1 Luo, Yanna A1 Tian, Guoliang A1 Yan, Yinan A1 Yin, Huaxiang YR 2023 K1 Costs K1 Logic gates K1 Inverters K1 Thin film transistors K1 Reliability K1 Three-dimensional integrated circuits K1 IGZO-TFT K1 vertical channel transistor K1 PVD IGZO K1 inverter SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC58779.2023.10219251 DO https://doi.org/10.1109/CSTIC58779.2023.10219251 SF ELIB - SuUB Bremen
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