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1 Ergebnisse
1
Experimental Investigation of Ultra-Low Temperature LA2O3/H..:
, In:
2023 China Semiconductor Technology International Conference (CSTIC)
,
Wei, Yanzhao
;
Yao, Jiaxin
;
Xu, Renren
.. - p. 1-3 , 2023
Link:
https://doi.org/10.1109/CSTIC58779.2023.10219296
RT T1 <cTitle>2023 China Semiconductor Technology International Conference (CSTIC)</cTitle>: T1 <Title>Experimental Investigation of Ultra-Low Temperature LA2O3/HFO2 Bi-Layer Dipole-First Process Using PVD Method for Advanced IC Technology</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10219296&Exemplar=1&LAN=DE A1 Wei, Yanzhao A1 Yao, Jiaxin A1 Xu, Renren A1 Zhang, Qingzhu A1 Yin, Huaxiang YR 2023 K1 Integrated circuits K1 Performance evaluation K1 Electron traps K1 Temperature K1 Modulation K1 Voltage K1 Silicon K1 Dipole-first K1 fine range VFB modulation K1 low temperature K1 magnetron sputtering K1 La-dipole K1 La2O3 SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC58779.2023.10219296 DO https://doi.org/10.1109/CSTIC58779.2023.10219296 SF ELIB - SuUB Bremen
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