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1 Ergebnisse
1
A Technical Optimization of Waferless Auto Clean for Alumin..:
, In:
2023 China Semiconductor Technology International Conference (CSTIC)
,
Qi, Li
;
Sang, Qiang-Qiang
;
Yao, Xing-Jun
... - p. 1-2 , 2023
Link:
https://doi.org/10.1109/CSTIC58779.2023.10219337
RT T1
2023 China Semiconductor Technology International Conference (CSTIC)
: T1
A Technical Optimization of Waferless Auto Clean for Aluminum Etcher
UL https://suche.suub.uni-bremen.de/peid=ieee-10219337&Exemplar=1&LAN=DE A1 Qi, Li A1 Sang, Qiang-Qiang A1 Yao, Xing-Jun A1 Xu, Li-Tian A1 Zhang, Jian-Kun A1 Hu, Li-Song A1 Liu, Yi-Chang A1 Chen, Chen YR 2023 K1 Aluminum K1 Cleaning K1 Etching K1 Polymers K1 Optimization K1 aluminum etcher K1 waferless auto clean K1 deposition removal K1 plasma etch SP 1 OP 2 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC58779.2023.10219337 DO https://doi.org/10.1109/CSTIC58779.2023.10219337 SF ELIB - SuUB Bremen
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