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Improvement of Sige Relaxation by a New Clamping Film Depos..:

, In: 2023 China Semiconductor Technology International Conference (CSTIC),
Xiao, Zhiqiang ; He, Cunzhe ; Gao, Dongliang... - p. 1-3 , 2023
Link: https://doi.org/10.1109/CSTIC58779.2023.10219339