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1 Ergebnisse
1
Effect of Surfactants on CMP Properties of M-Plane Sapphire:
, In:
2023 China Semiconductor Technology International Conference (CSTIC)
,
Zou, Yida
;
Niu, Xinhuan
;
Hou, Ziyang
... - p. 1-3 , 2023
Link:
https://doi.org/10.1109/CSTIC58779.2023.10219355
RT T1
2023 China Semiconductor Technology International Conference (CSTIC)
: T1
Effect of Surfactants on CMP Properties of M-Plane Sapphire
UL https://suche.suub.uni-bremen.de/peid=ieee-10219355&Exemplar=1&LAN=DE A1 Zou, Yida A1 Niu, Xinhuan A1 Hou, Ziyang A1 Qu, Minghui A1 Zhan, Ni A1 Liu, Jianghao YR 2023 K1 Zinc oxide K1 Surface roughness K1 Rough surfaces K1 Surfactants K1 Gallium nitride K1 Substrates K1 Slurries K1 JFCE surfactant K1 SDBS surfactant K1 CTAB surfactant K1 M-plane Sapphire K1 Chemical Mechanical polishing (CMP) SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC58779.2023.10219355 DO https://doi.org/10.1109/CSTIC58779.2023.10219355 SF ELIB - SuUB Bremen
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