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Self-Limited Etching of Silicon Nitride Using Cyclic Proces..:

, In: 2023 China Semiconductor Technology International Conference (CSTIC),
Wang, Xue-Hua ; Xu, Li-Tian ; Cheng, Tian - p. 1-2 , 2023
Link: https://doi.org/10.1109/CSTIC58779.2023.10219393