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Modeling of Near-and Far-Field Diffraction from EUV Absorbe..:

, In: 2023 Photonics & Electromagnetics Research Symposium (PIERS),
Medvedev, V. ; Erdmann, A. ; Rosskopf, A. - p. 297-305 , 2023
Link: https://doi.org/10.1109/PIERS59004.2023.10221390