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1 Ergebnisse
1
Study of W centers formation in silicon upon ion implantati..:
, In:
2023 IEEE Photonics Society Summer Topicals Meeting Series (SUM)
,
Andrini, G.
;
Zanelli, G.
;
Tchernij, S. Ditalia
... - p. 1-2 , 2023
Link:
https://doi.org/10.1109/SUM57928.2023.10224442
RT T1
2023 IEEE Photonics Society Summer Topicals Meeting Series (SUM)
: T1
Study of W centers formation in silicon upon ion implantation and rapid thermal annealing
UL https://suche.suub.uni-bremen.de/peid=ieee-10224442&Exemplar=1&LAN=DE A1 Andrini, G. A1 Zanelli, G. A1 Tchernij, S. Ditalia A1 Corte, E. A1 Hernandez, E. Nieto A1 Verna, A. A1 Cocuzza, M. A1 Bernardi, E. A1 Virzi, S. A1 Traina, P. A1 Degiovanni, I.P. A1 Olivero, P. A1 Genovese, M. A1 Forneris, J. YR 2023 SN 2376-8614 K1 Rapid thermal annealing K1 Ion implantation K1 Temperature K1 Optical microscopy K1 Stimulated emission K1 Photoluminescence K1 Silicon K1 quantum photonics K1 silicon K1 telecom emitters K1 rapid thermal annealing K1 ion implantation SP 1 OP 2 LK http://dx.doi.org/https://doi.org/10.1109/SUM57928.2023.10224442 DO https://doi.org/10.1109/SUM57928.2023.10224442 SF ELIB - SuUB Bremen
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