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1 Ergebnisse
1
Optimizing the Structural Parameters of the Mechanical Sens..:
, In:
2023 IEEE 24th International Conference of Young Professionals in Electron Devices and Materials (EDM)
,
Barbin, Evgenij S.
;
Nesterenko, Tamara G.
;
Koleda, Aleksei N.
... - p. 850-854 , 2023
Link:
https://doi.org/10.1109/EDM58354.2023.10225059
RT T1
2023 IEEE 24th International Conference of Young Professionals in Electron Devices and Materials (EDM)
: T1
Optimizing the Structural Parameters of the Mechanical Sensing Element of a Microoptoelectromechanical Micro-g Accelerometer
UL https://suche.suub.uni-bremen.de/peid=ieee-10225059&Exemplar=1&LAN=DE A1 Barbin, Evgenij S. A1 Nesterenko, Tamara G. A1 Koleda, Aleksei N. A1 Shesterikov, Evgeniy V. A1 Kulinich, Ivan V. A1 Kokolov, Andrey A. YR 2023 SN 2325-419X K1 Accelerometers K1 Suspensions (mechanical systems) K1 Sensitivity K1 Silicon-on-insulator K1 Resonant frequency K1 Optical variables measurement K1 Frequency measurement K1 accelerometer K1 optical measuring transducer K1 micromechanical sensing element K1 Brownian noise K1 mass K1 dimensions SP 850 OP 854 LK http://dx.doi.org/https://doi.org/10.1109/EDM58354.2023.10225059 DO https://doi.org/10.1109/EDM58354.2023.10225059 SF ELIB - SuUB Bremen
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