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1
Automation of Thin Film Flaw Detection Processes as a Stage..:
, In:
2023 IEEE 24th International Conference of Young Professionals in Electron Devices and Materials (EDM)
,
Kondrashov, Vladimir V.
;
Zemlyakov, Evgeny V.
;
Seredin, Oleg S.
... - p. 1660-1663 , 2023
Link:
https://doi.org/10.1109/EDM58354.2023.10225124
RT T1 <cTitle>2023 IEEE 24th International Conference of Young Professionals in Electron Devices and Materials (EDM)</cTitle>: T1 <Title>Automation of Thin Film Flaw Detection Processes as a Stage in the Development of Laser Resistor Trimming Technology in Microelectronics</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10225124&Exemplar=1&LAN=DE A1 Kondrashov, Vladimir V. A1 Zemlyakov, Evgeny V. A1 Seredin, Oleg S. A1 Chapkin, Vyacheslav V. A1 Pozdeeva, Ekaterina Yu. A1 Stankevich, Stanislav L. YR 2023 SN 2325-419X K1 Resistors K1 Printed circuits K1 Measurement by laser beam K1 Documentation K1 Laser modes K1 Etching K1 Microelectronics K1 thin films K1 inspection K1 machine vision K1 resistor laser trimming K1 voltage downward trimming K1 femtosecond laser ablation SP 1660 OP 1663 LK http://dx.doi.org/https://doi.org/10.1109/EDM58354.2023.10225124 DO https://doi.org/10.1109/EDM58354.2023.10225124 SF ELIB - SuUB Bremen
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