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1 Ergebnisse
1
Numerical Simulation of Grating Input/Output Elements into ..:
, In:
2023 IEEE 24th International Conference of Young Professionals in Electron Devices and Materials (EDM)
,
Barbin, Evgenij S.
;
Kulinich, Ivan V.
;
Koleda, Aleksej N.
.. - p. 860-863 , 2023
Link:
https://doi.org/10.1109/EDM58354.2023.10225188
RT T1 <cTitle>2023 IEEE 24th International Conference of Young Professionals in Electron Devices and Materials (EDM)</cTitle>: T1 <Title>Numerical Simulation of Grating Input/Output Elements into Optical Waveguides Based on Si3N4/SiO2 Thin Films</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10225188&Exemplar=1&LAN=DE A1 Barbin, Evgenij S. A1 Kulinich, Ivan V. A1 Koleda, Aleksej N. A1 Myrzakhmetov, Ayan A1 Perin, Anton YR 2023 SN 2325-419X K1 Diffraction K1 Diffraction gratings K1 Optical variables control K1 Geometrical optics K1 Etching K1 Gratings K1 Optical reflection K1 input/output of optical radiation K1 diffraction grating K1 silicon nitride K1 insertion angle K1 period K1 filling factor K1 etching depth K1 undercutting SP 860 OP 863 LK http://dx.doi.org/https://doi.org/10.1109/EDM58354.2023.10225188 DO https://doi.org/10.1109/EDM58354.2023.10225188 SF ELIB - SuUB Bremen
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