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1 Ergebnisse
1
Exploiting Thermal Scanning Probe Lithography for the Fabri..:
, In:
2023 International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC)
,
Pellegrini, Paloma E. S.
;
Nista, Silvia V. G.
;
De Lara, Daniel
... - p. 1-2 , 2023
Link:
https://doi.org/10.1109/OMN/SBFotonIOPC58971.2023.1023..
RT T1 <cTitle>2023 International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC)</cTitle>: T1 <Title>Exploiting Thermal Scanning Probe Lithography for the Fabrication of Micro and Nano Electronic Devices</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10230965&Exemplar=1&LAN=DE A1 Pellegrini, Paloma E. S. A1 Nista, Silvia V. G. A1 De Lara, Daniel A1 Canesqui, Mara Adriana A1 Bortolucci, Emilio Carlos A1 Moshkalev, Stanislav YR 2023 SN 2160-5041 K1 Performance evaluation K1 Micromechanical devices K1 Nanophotonics K1 Gold K1 Lithography K1 Optical device fabrication K1 Nanoscale devices K1 Thermal scanning probe lithography K1 micro and nanostructures SP 1 OP 2 LK http://dx.doi.org/https://doi.org/10.1109/OMN/SBFotonIOPC58971.2023.10230965 DO https://doi.org/10.1109/OMN/SBFotonIOPC58971.2023.10230965 SF ELIB - SuUB Bremen
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