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Damage-Free Cleaning of 2D van der Waals Heterostructures w..:

, In: 2023 IEEE 23rd International Conference on Nanotechnology (NANO),
Ding, Xiaolei ; Qiao, Boshi ; Chen, Haohan... - p. 899-903 , 2023
Link: https://doi.org/10.1109/NANO58406.2023.10231217