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1
Numerical Simulations of Silicon Nitride Etching in V-NAND ..:
, In:
2023 IEEE 23rd International Conference on Nanotechnology (NANO)
,
Choi, Seoyeon
;
Kim, Pilbum
;
Park, SangWook
... - p. 266-269 , 2023
Link:
https://doi.org/10.1109/NANO58406.2023.10231226
RT T1 <cTitle>2023 IEEE 23rd International Conference on Nanotechnology (NANO)</cTitle>: T1 <Title>Numerical Simulations of Silicon Nitride Etching in V-NAND Structures</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10231226&Exemplar=1&LAN=DE A1 Choi, Seoyeon A1 Kim, Pilbum A1 Park, SangWook A1 Kim, Kiho A1 Jung, Yongjae A1 Hong, Jaeick A1 Kang, Song-Yun YR 2023 SN 1944-9380 K1 Computational modeling K1 Films K1 Silicon nitride K1 Predictive models K1 Numerical simulation K1 Etching K1 Data models SP 266 OP 269 LK http://dx.doi.org/https://doi.org/10.1109/NANO58406.2023.10231226 DO https://doi.org/10.1109/NANO58406.2023.10231226 SF ELIB - SuUB Bremen
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